Browsing OSU Theses by Subject "248 nm"
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Micromachining Using an Excimer (248nm) Laser
(Oklahoma State University, 2004-05-01)An excimer laser micromachining facility was developed to investigate laser-material interaction. It includes the COMPex 205i excimer laser (manufactured by Lambda Physik) using a krypton fluoride (KrF) (248nm wavelength) ...